High voltage solutions for ion implantation
Proven high voltage power solutions for guaranteed yield
Ion implanation is a critical step in semiconductor fabrication and some metal finishing processes. Manufacturers want to guarantee yield and avoid the cost of line down during this process to maximize their revenue.
The quality, reliability and repeatability of your high voltage power supply is key to maintaining process consistency and product quality.
Safety and reliability built in
Reducing the risk of wafer and equipment damage
The high reliability and repeatability of our high voltage power solutions help prevent a negative impact on production volume and reduce the likelihood of line down.
To ensure safety and reliability, we provide accurate arc sensing, custom arc management, and controls and monitors. This helps you manage high voltage arcing in the system and minimizes the damage to the load, the equipment, and the wafer.
High reliability products for ion implantation applications
FT Series
Output voltages 0-60k VDC
0 to 100% programmable voltage and current
Air insulated
Local, analog, RS232/USB digital control with optional ethernet
Voltage and current monitor outputs
UKCA and CE marked for EMC, low voltage (LVD) and ROHS directives
EY Series
Output voltages 0-60kVDC
2U 19" rack mount
Output voltage & current regulated
Low ripple <0.03% RMS of rated voltage at full load
Efficiency >85%
Operating temperature: -20°C to +40°C
BQ Series
Outputs voltages 0-15kVDC to 0-100kVDC
Positive, negative & reversible models
Analogue remote control, Ethernet, RS232 & USB optional
Input voltage 208VAC 3-phase, 200/380/415/480VAC optional
High load and line regulation
Arc quench, arc count, short-circuit and thermal protection